From Marx to Mumford and Heidegger， to the Frankfurt School， British neo-Marxism， post-Marxism and eco-Marxism， up to the contemporary era， the critique of technology has always been an important means of resisting capitalism and realizing the liberation of mankind. Taking the critique of technology as the logical starting point and ultimately pointing to the social critique of capitalism， this process has formed various distinctive paradigms for the study of the critique of technology： Marx paid special attention to the social function of technology and created the paradigm of the social critique of technology； humanist research paradigm of the critique of technology was formed by such thinkers as Mumford and Heidegger； the paradigm of the critique of technology has shown a diversified development in the twentieth century， with the Frankfurt School focusing on technological rationality， British neo-Marxism based on technological criticism of culture and politics， post-Marxism explains the structural changes of capitalism with the side of technology， and eco-Marxism focuses on the ecological consequences of the use of technology in the capitalist mode of production； before and after the 21st century， technological criticism has deepened on the basis of the original ideas， showing three trends of development. By historically analyzing the internal logic of the paradigm shift of technology critique， we can gain a deeper understanding of the shortcomings and limitations of capitalism， and provide useful thoughts for improving the construction of socialism and reaching the ideal social form of human beings.